Proteus MetroKit is a toolset designed to facilitate and automate the process of interfacing with metrology tools, thereby minimizing tool downtime and maximizing engineering efficiency. The toolset provides the ability to generate test patterns for modeling, automate the creation of metrology recipes for empirical data collection, reformat and analyze empirical data collected from the metrology tool for use with other Proteus applications, and create gauge files for model tuning. This product is offered as an upgrade option to IC WorkBench Plus (ICWB Plus) and Proteus WorkBench (PWB).